Surface integrity in electric discharge machining (EDM) has always been a major concern in the manufacturing industry. Although EDM with powder suspended dielectric has shown good potential in enhancing material removal rate and improving surface finish, the influence of the same on overall surface integrity is not very clear. The current work utilized (?-Fe2O3) nano-powder and evaluated its role in combination with concentration and machining parameters, on surface roughness (Ra, Rmax), surface crack and thickness of recast layer, during powder-mixed micro-EDM (PMµEDM) of Co-Cr-Mo. SPM data are obtained through the database and its morphologies and meteorology are studied using the gwyddion software. Results showed that significant reduction in surface roughness, crack density and recast layer thickness is possible with the PMµEDM process.